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Scandium

Sc
Deposition: PVD — Sputter & Evaporator
Category: Metal
Formula: Sc

Scandium (Sc) thin films deposited by sputtering and evaporation — used for AlScN co-sputtering and alloy films. Targets: 99.99 %, 3 in.

Specifications

Thin-Film Specifications

Scandium characterization data 1
Scandium characterization data 2

Target Specifications

  • Target Material : Scandium (Sc)
  • Purity : 99.99%
  • Diameter : 3”
Scandium sputtering target Target
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