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Indium Tin Oxide

ITO
Deposition: PVD — Sputter & Evaporator
Category: Oxide
Formula: ITO

Indium tin oxide (ITO) transparent conductive films by RF magnetron sputtering. A 125 nm film delivers 44 Ω/sq sheet resistance (ρ = 5.49 × 10⁻⁶ Ω·m) with > 90 % transmittance — the workhorse transparent electrode for displays, touch panels and smart glass. Targets: 99.5 %, 3 in.

Specifications

Thin-Film Specifications

Indium Tin Oxide characterization data 1
Indium Tin Oxide characterization data 2
  • Film-coated by RF magnetron sputtering vacuum < 1.0 × 10⁻⁶ Torr
  • Substrate : Si (100)
  • Thickness : 125 nm
  • Sheet resistance : 44 Ω/sq / Resistivity: 5.49E-06 Ω·m
  • Transmittance : >90%
  • Refractive Index (n) : 1.991928 (@ 587 nm)
  • Extinction Coefficient (k) : 0.007197 (@ 587 nm)

Target Specifications

  • Target Material : Indium Tin Oxide
  • Purity : 99.5%
  • Diameter : 3”
Indium Tin Oxide sputtering target Target