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Titanium Dioxide

TiO₂
Deposition: PVD — Sputter & Evaporator
Category: Oxide
Formula: TiO₂

Titanium dioxide (TiO₂) optical thin films by RF magnetron sputtering (vacuum < 1.0 × 10⁻⁶ Torr, Si (100)). A 150 nm film shows a high refractive index of 2.534 @ 587 nm (2.422 @ 1525 nm) with zero extinction — suited to optical coatings, photocatalysis and high-k stacks. Targets: 99.99 %, 3 in.

Specifications

Thin-Film Specifications

Titanium Dioxide characterization data 1
Titanium Dioxide characterization data 2
Titanium Dioxide characterization data 3
  • Film-coated by RF magnetron sputtering vacuum < 1.0 × 10⁻⁶ Torr
  • Substrate : Si (100)
  • Thickness : 150 nm
  • Refractive Index (n) : 2.534084 (@ 587 nm) / 2.422304 (@ 1525 nm)
  • Extinction Coefficient (k) : 0.000000 (@ 587 nm) / 0.000000 (@ 1525 nm)

Target Specifications

  • Target Material : Titanium Dioxide
  • Purity : 99.99%
  • Diameter : 3”
Titanium Dioxide sputtering target Target